WebElectrostatic chuck (E-Chuck, ESC) An electrostatic chuck (E-Chuck, ESC) is a chuck that absorbs and fixes (chucks) a workpiece by using an electrical force that causes objects to attract each other with static … WebProperty Description Visibility; id: The maintenance ID: Edmunds, Partners, Public: engineCode: The engine code that this maintenance applies to: Edmunds, Partners ...
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WebKey characteristics for high performance e-chuck wafer contact surface include particle and metal generation, electrical conductivity for surface charge dissipation, thermal conductivity for backside gas cooling, oxidation and corrosion protection, wear resistance, adhesion enhancement and flatness stability etc. Traditionally, wafer contact … Web(Received 31 July 2007/Accepted 14 September 2007) Johnsen-Rahbek electrostatic chuck (ESC) is installed on the cathode side of a capacitive RF discharge, and the ESC voltage-current (V-I) characteristic is measured under various conditions. First, the reference V-I curve is obtained for a grounded aluminum (Al) wafer without discharge. open toe thigh high shoes
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